901P MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducers
901P MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducers
Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
- Absolute pressure measurement from 1,000 to 10-5 Torr
- 3-sensor functionality in a single transducer for a wide measurement range
- Analog, RS232, RS485, & EtherCAT® versions
- Optional integrated touch-screen display available for local pressure indication
- Fast, accurate and repeatable pressure measurements reduces process cycle time
- Three optional set points with fast response time for reliable process control See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | 901P-11030 | |||||
 | 901P-11034 | |||||
| 901P-12030 | |||||
| 901P-12034 | |||||
 | 901P-17020 | |||||
| 901P-21030 | |||||
| 901P-21034 | |||||
| 901P-22030 | |||||
| 901P-22034 | |||||
| 901P-27020 |
Configuration Options
The following options are available for 901P Loadlock Vacuum Pressure Transducers
Ordering Code Example: 901P-1E0V0
| Configuration Option | Option Code |
|---|---|
| 901P Vacuum Pressure Transducer | 901P |
Fitting | |
| NW16 ISO-KF | 1 |
| NW25 ISO-KF | 2 |
| 0.125 in. NPT male | 3 |
| 4 VCR female | 4 |
| 8 VCR female | 5 |
| 1.33 in. OD CF | 6 |
| NW16 ISO-KF, extended | 8 |
Interface | |
| RS232/Analog | 1 |
| RS485/Analog | 2 |
| EtherCAT/Analog | 7 |
Analog Output | |
| Standard MKS | 0 |
Connector Relays | |
| D-Sub 15 pin HD male/No Relay | 2 |
| D-Sub 15 pin HD male/Three Relays | 3 (not available wth EtherCAT) |
| D-Sub 15 pin HD male/Three Relays/Dual Aout (piezo differential) | 4 (not available wth EtherCAT) |
| D-Sub 15 pin HD male/Three Relays/Dual Aout (Absolute) | 5 (not available wth EtherCAT) |
Enclosure | |
| Standard/Viton Sealing | 0 |
| Standard/Viton Sealing/Display (not available with EtherCAT) | 4 |
Specifications
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationRS485/RS232 (4800 to 230400 Baud)
- SensorMicroPirani™ (MEMS Thermal Conductivity)
Piezo differential (MEMS diaphragm) - Relays3 relays SPDT (optional)
- Set Point RangeAbsolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
- Operating Temperature0° to 40°C (32° to 104°F)
- Maximum Bakeout Temperature85°C (185°F), non-operating
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog OutputAbsolute Pressure: 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit)
- Optional Analog Output 2Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit)
- Relay Contact Rating1 A @ 3 0VAC/DC, resistive
- Relay Response100 msec maximum
- Power RequirementsRS232/RS485: 9 to 30 VDC, < 1.2 watts max
EtherCAT: 9 to 30 VDC, < 2 watts max - MicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading - MicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy-10 to +10 Torr ±10% of reading
-100 to -10 Torr ±8% of reading
-760 to -100 Torr ±1% of reading
+10 to 100 Torr ±5% of reading - Piezo Differential Repeatability-760 to +10 Torr ±1% of reading
- Piezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit1500 Torr (Absolute)
- Internal Volume(KF16) 2.8 cc
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
- Electronic Casing and Flange304 stainless steel
- Weight170 g (with KF 16 Flange)
- ComplianceCE
Features
Absolute and Differential Pressure Measurement
The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides patented, gas independent absolute pressure measurement from 50 -1000 Torr with increased accuracy over thermal conductivity sensors.
MicroPirani™ Sensor Technology
Unlike traditional Pirani gauges, the sensor element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani™ technology, the 901P can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 901P can be mounted in any orientation without compromising accuracy.
Piezo Differential Sensor Technology
The Piezo is a differential pressure sensor, ensuring correct atmospheric pressure measurement under varying barometric pressure conditions. Piezo technology is a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from -760 to +760 Torr relative to atmospheric pressure.
Analog Pressure Output
The 901P also has an analog pressure output of 1VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. A secondary optional analog output is used to provide the differential pressure measurement.
Three Process Control Relays
The 901P has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the differential piezo measurement or the combined absolute MicroPirani™ - Piezo measurement.
Compact Design
The compact design of these vacuum transducers significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
PDR900 Power Supply & Display
The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications.
Resources
Literature
901P Micropirani/Piezo Loadlock Transducer(330.6 kB, PDF) Vacuum Measurement Product Guide(711.5 kB, PDF)
Manuals
901P Loadlock Transducer Manual (100017121, Rev. L)(2.6 MB, PDF) 900 Series Vacuum Transducer USB Adapter Manual(129.6 kB, PDF) 901P Transducer Standard Version Setup Instructions(199.8 kB, PDF) 901/901 Plus Vacuum Sensor Pin-outs(983.3 kB, PDF) 900 Series EtherCAT Communication Protocol Manual (20003335)(925.8 kB, PDF)
Drawings & CADs
901P Vacuum Transducer Dimensional Drawing(87.7 kB, PDF)
Application Notes
Optimized Loadlock Pressure Sensing with the 901P Transducer(256.6 kB, PDF)
Device Description Files
901P EtherCAT Slave Information (ESI) File(166.8 kB, XML)
