Chemical Downstream Plasma Source
Overview
The AX7610 is a microwave plasma source for remote plasma applications. With replaceable quartz or sapphire plasma tubes, the AX7610 downstream source offers configuration flexibility to meet the most demanding application process parameters. The quartz tube version is ideally suited for production of atomic oxygen, nitrogen or argon. The sapphire tube version is compatible with much more severe CF4 CHF3 and NF3 chemistries.
- Sapphire or quartz discharge tubes for Fluorine and non-fluorine chemistries
- Patented conductively-cooled design with high power and throughput
- Easy integration
- Wide application range
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AX7610Q Chemical Plasma Source, 3 kW, Quartz |
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AX7610S Chemical Plasma Source, 3 kW, Sapphire |
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SA7610QTZ4 Plasma Source Tube Assembly, Quartz, AX7610 |
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SA7610SAPP4 Plasma Source Tube Assembly, Sapphire, AX7610 |
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Specifications
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TypeAX7610 Downstream Plasma Source
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Maximum Power3.0 kW
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Electrical Requirements for UV Lamp24 VDC, 1.0 Amp
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CoolingWater (3/8 in. Swagelok® fitting) 0.35 gpm, 30°C Max at 30psid minimum
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Gas Line Connection1/4 or 3/8 inch VCR®
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Output FlangeKF40, KF50 or custom
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Process Gas SupplyQuartz Tube: O2, N2, H2O, Ar, non-fluorine based gases and perating pressure 1 to 8 Torr typical
Sapphire Tube: O2, N2, H2O, Ar, NF3, CF4, C2F6, and other Fluorine-based gases and operating pressure 2 to 8 Torr typical -
Dimensions15.3 in (388 mm) Long
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Weight10 lb. (4.5 kg)
Features
Resources
Literature
- AX7610 Chemical Downstream Plasma Source (281 kB, PDF)
Ultra-High Velocity