AX2600 and AX2700 Microwave Plasma Subsystems
Overview
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
- 3 kW Power
- Accurate power measurement, closed loop control and automatic plasma tuning
- Precise microwave generator with closed loop control power regulation
- Delivers high productivity with fast tune times < 1 sec in various chemistries
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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AX2600-AX2700 Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning |
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Specifications
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TypeAX2600 & AX2700
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Maximum Plasma Power Output1.8 or 3.0 kW
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Frequency2440 - 2470 MHz
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Output Accuracy±1.5% (from 20 - 100% of max. power)
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Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
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ChemistriesO2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
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Applicator MaterialQuartz, Sapphire
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Operating Pressure2 - 8 Torr
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CommunicationsAnalog, RS485, DeviceNet™ or EtherCAT®
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ComplianceCE, ETL, SEMI S2-93A, SEMI F47
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Time to Match< 2 sec
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Total Gas Flow1 - 7 slm
Features
Resources
Literature
- AX2600 & AX2700 Series Microwave Plasma Subsystems (217.5 kB, PDF)
Ultra-High Velocity