Another standard feature is a TIG fusion welded vacuum grade body made of highly, corrosion resistant, 304 stainless steel, creating fewer entrapment areas, resulting in less contamination buildup. The Corrosion Resistant Valve is available in angle and inline configurations. Port sizes include NW 40 and NW 50 using maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz®, Perlast® or Gumlast® for higher temperature conditions and increased chemical resistance.

The Corrosion and Ozone Resistant Valve is designed to provide long life in extremely harsh semiconductor or solar processes. This is achieved by shielding the thin wall bellows, limiting bellows exposure to corrosive or reactive gases. Typical processes that require a corrosion resistant valve are CVD and Etch. These processes use gases such as fluorine, chlorine, bromide or ozone. An aluminum shield is recommended for fluorine or ozone while a stainless shield should be used when chlorine or bromide are used. This valve can also be used in exhaust line applications to avoid corrosion of the valve bellows.