LoPro™ single-stage bellows vacuum isolation valves have a small footprint that fits easily into existing, and new, vacuum systems. A formed stainless-steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions that extends the valves life cycle over a conventional O-ring shaft sealed valve. The bellows' stroke length is optimized to assure a long cycle life while maintaining high conductance.
Features
TIG Fusion-welded Bead-blasted Body
Another standard feature is a TIG fusion-welded, bead-blasted body made of high grade, corrosion resistant, 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminant build-up. In the event of power or air loss, the pneumatic LoPro Valve will automatically spring to close. Actuation can be pneumatic or manual.
LoPro™ Valve Options
The LoPro Valve is available in both angle and inline versions. Port sizes include outside diameters of 1, 1½, and 2 inches and standard port interfaces include KF flanges, CF flanges, and weld stubs. For leak-tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, in Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance, and in Buna-N or Silicone.
How to Rebuild an Isolation Valve
Learn how to replace the internal assembly on an MKS Isolation valve. We will be replacing the internals in the MKS valve LPV1-40-AK-CNVS. The process is similar for most MKS isolation valves.
Accessories
Replacement Solenoids
Valve Seals
Limit Switches
Internal Rebuild Kits
Resources
Literature
LoPro™ Compact Vacuum Valves(218.8 kB, PDF)
Manuals
LoPro™ Single Stage Vacuum Valve Manual(461.3 kB, PDF)
