LoPro™ Soft-start Bellows Vacuum Isolation Valve
Overview
LoPro™ two-stage valves soft start the system in two easy steps without the use of secondary bypass lines, which clog easily and are expensive to maintain. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a vacuum pressure specified by the end-user. In the second stage, the main valve opens, allowing use of full pumping speed. The main valve is smaller, lighter, and lower in cost than similar competitive valves while offering improved reliability and increased uptime. The square cap design is easy to assemble and maintain.
- NW25 - NW50
- Two-stage with adjustable conductance for variable pump down speed
- 1,000,000 cycle rating (clean environments)
- Reduces particulate contamination during early turbulent pumpdown
Products
Configuration Options
Please see the LPV2 datasheet for available product options.
Specifications
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TypeLow-profile, Two-stage, Soft-start, Bellows-sealed Isolation Valves
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Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
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Port SizeNW25, NW40, NW50
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Helium Leak Rate1.0 x 10-9 std cc/sec
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Cylinder VolumeMain cylinder: 1.2 - 6.4 in3, depending on configuration
Bypass: 100 in 3 -
Cylinder Air Pressure90 psig ±30 psig
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Limit Switch Rating5A - 250 VAC
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Single Pole, Single Throw5A - 30 VDC
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Blow-By PressureMain: 80 - 45 psi, depending on configuration
Bypass: 45 psi -
Actuation TimeMain: 40 - 160 msec to open, 90 - 220 msec to close, depending on configuration
Bypass: 100 msec (both) -
Maximum Internal Spring Closing Pressure38 - 60 psia, depending on configuration
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Maximum Bakeout Temperature150°C
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Typical Life1,000,000 cycles
Features
Accessories
Replacement Solenoids
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100008163 Solenoid Valve, Replacement, 24 VDC, 7 Watt | $168 |
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100008164 Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt |
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$210 |
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100008165 Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt |
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$221 |
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100008166 Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt |
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$145 |
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100008167 Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt |
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$180 |
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100008539 Solenoid Valve, Replacement, 12 VDC, 7 Watt |
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$105 |
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Valve Seals
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100008619 Viton Seal Set, LoPro 2-Stage Valve, NW25 Port | $37 |
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100008624 Viton Seal Set, LoPro 2-Stage Valve, NW40 Port |
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$37 |
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100008629 Viton Seal Set, LoPro 2-Stage Valve, NW50 Port | $37 |
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100008623 Chemraz Seal Set, LoPro 2-Stage Valve, NW25 Port | $594 |
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100008628 Chemraz Seal Set, LoPro 2-Stage Valve, NW40 Port | $793 |
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100008633 Chemraz Seal Set, LoPro 2-Stage Valve, NW50 Port | $893 |
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Limit Switches
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
| |
100002227 Limit Switch Kit, High Cycle, LoPro, LoPro 2-stage Valves, NW25 |
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$160 |
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100002228 Limit Switch Kit, High Cycle, LoPro, and LoPro 2-stage Valves, NW40 |
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$150 |
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100002229 Limit Switch Kit, High Cycle, LoPro, and LoPro 2-stage Valves, NW50 |
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$160 |
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Internal Rebuild Kits
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100010104 Valve Rebuild Kit with Viton Seal Set, Lopro Single, 2-stage Pneumatic Valves, NW25 | $350 |
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100004938 Bypass Valve Rebuild Kit, Viton Seals, 2-stage and LoPro Two-stage valves with Thumbscrew |
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$340 |
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100010103 Valve Rebuild Kit with Viton Seal Set, Lopro Single and Two Stage Pneumatic Valves, NW40 |
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$366 |
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100004937 Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves |
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$285 |
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100010102 Valve Rebuild Kit with Viton Seal Set, Pneumatic Lopro Single & 2-stage Valves, NW50 |
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$586 |
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100004920 Bypass Valve Spare Parts, Thumb Screw, Viton Seals, Conversion Kit | $426 |
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100004939 Bypass Valve Rebuild Kit, Viton Seals, 2-stage, CV, IDA, LoPro 2-stage valves with Micrometer | $357 |
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100004919 Bypass Valve Spare Parts, Normally Closed, Viton Seals, Conversion Kit | $357 |
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100004921 Bypass Valve Spare Parts, Micrometer, Viton Seals, Conversion Kit | $798 |
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Resources
Literature
- LoPro™ Two-Stage Compact Vacuum Soft-Start Valves (333.8 kB, PDF)
Manuals
- MKS LoPro 2-stage Valve Manual (213 kB, PDF)
Ultra-High Velocity