ILP Integrated Soft-start Vacuum Isolation Valve
Overview
Integrated LoPro™ (ILP) valves are pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed.
- NW25 - NW50
- Compact design with two valves in one compact body
- 1,000,000 cycles (clean environments)
- The bypass stage conductance is adjustable by turning an adjustment screw
Products
Configuration Options
Please see the ILP Low-profile Valve datasheet for available product options.
Specifications
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TypeLow-profile, Integrated Two Stage, Soft-start Isolation Valve
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Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
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Body ConfigurationAngle, Inline
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Port SizeNW25, NW40, NW50
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Helium Leak Rate1.0 x 10-9 std cc/sec
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Limit SwitchFunction of actuation: Normally open
Operating voltage range: 12-27 VDC (24 VDC nominal)
Switching current: 1W (DC) max.
Response time: on - < 0.6 msec
Temperature range: -20 to 70°C
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Cylinder VolumeMain: 1.2 - 6.4 in.3, depending on configuration
Bypass: 0.16 in3 -
Cylinder Air Pressure90 psig ±30 psig
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Blow-By PressureMain: 45 - 100 psia, depending on configuration
Bypass: > 100 psia -
Actuation TimeMain: 0.12-0.45 seconds opening, 0.18 - 1.13 seconds closing, depending on configuration
Bypass: <0.10 seconds -
Typical Life1,000,000 cycles
Features
Resources
Literature
- Integrated LoPro™ Two-Stage Valve (ILP) (2 MB, PDF)
Manuals
- Integrated LoPro™ Vacuum Valve (ILP) Manual (207.3 kB, PDF)
Ultra-High Velocity