Vision 2000-P™ Residual Gas Analyzers for Select Pressure & PVD Processes

Products
Features
Accessories
Resources
Contact Us

vision 2000-p rga for select pressure & pvd

Overview

The Vision 2000-P™ represents a different concept in process monitoring, requiring minimum operator interaction or RGA knowledge. The Vision 2000-P incorporates the “smart head” RGA technology of the Microvision 2 with a closed ion source and close-coupled inlet. This state-of-the-art RGA technology is integrated with Process Eye™ Professional Control Platform, a recipe based, user-configurable software program. The advanced technology available in the Vision 2000-P provides users with simple, effective, process monitoring operation.

ppb level detection of contaminant gases during PVD processes
Track process gas mixture composition when two gases are utilized
Vacuum troubleshooting for fast PM recovery
Can be integrated with a wide variety of PVD tools
Remote Vacuum Controller (RVC) for fail-safe PC-based operation and control
Available with Process Eye Professional software

See All Features

Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Mass Range	Minimum Detectable Concentration	Mass Stability	Type	Analyzer Housing Base Pressure	Availability	Featured Item	Price		Brand
		VISION-2000-P Process Monitor, Select Pressure & PVD Applications, Vision 2000-P™ Show	VISION-2000-P Process Monitor, Select Pressure & PVD Applications, Vision 2000-P™	UNIVERSAL	0.0	1.0	0.0		0.0	1-100, 1-200, or 1-300 amu	<100 ppb for all common gases except <10 ppm for H2	Better than ±0.1 amu over 8 hours	Residual Gas Analyzer	Better than 5e^-9 Torr after bakeout	Show

Show All

Specifications

Mass Range

1-100, 1-200, or 1-300 amu
Ion Source

High conductance closed ion source
Filaments

Replaceable twin Tungsten or Thoria filaments
Mass Filter

Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Detector

Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure

7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure

<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
Minimum Detectable Concentration

<100ppb for all common gases except <10ppm for H2 (trace gas detection limit)
Mass Stability

Better than ±0.1 amu over 8 hours
Resolution

Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange

DN35CF (70mm/2.75 inch OD) Conflat® flange
Vacuum Hardware

60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
Analyzer Housing Base Pressure

Better than 5e-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket

Included for 180°C bakeout
Operating Temperature

Electronics: 10-40°C

Mechanical Support

Optional stands and brackets are available
Mobile RGA Platform

Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604 mm)
Pneumatics

60-80 psig CDA
Power Requirements

88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions

80% RH (non condensing)
LED Status Indication

Interlock status, filament emission, SEM, power and communications
I/O Capability

4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities

Leak check headset socket, external filament trip socket, instrument reset
Software

Process Eye Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication

Ethernet CAT-5e
PC Requirements

Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor

Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight

44 lbs (20 Kg)
Foreline Pump

Dry diaphragm standard; Other options available
Compliance

CE (control unit)

Features

Accessories

Compatible Software

Description	Compatibility	Avail.	Price
512-000/D Gas Analyzer Software, EasyView, Residual Gas	UNIVERSAL	Show	$721.00
TOOLWEB-RGA Chamber Monitor Software, Residual Gas Analyzer, TOOLweb®	UNIVERSAL	Show
PROCESS-EYE-PROFESSIONAL Process Monitoring Software, Residual Gas Analyzer, Process Eye™ Professional	UNIVERSAL	Show