Vision 2000-P™ XD High Sensitivity Residual Gas Analyzers for Select Pressure & PVD Processes
Overview
The Vision 2000-P™ XD system is designed to monitor critical gas species at a selected pressure, from base vacuum up to 10 Torr. It is ideally suited to monitor vacuum integrity, contamination levels, or dynamics of specific process-related gases within semiconductor and thin film PVD process tools, and to alert operators about conditions that can negatively impact product yield. The Vision 2000-P XD also incorporates V-lens™ technology, taking the proven performance of the Vision 2000-P system to a new level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems (QMS).
- PVD contamination monitoring (inc. hydrocarbons) to sub-ppm levels
- Cleaner baseline and lower noise across the mass scale
- Up to 10 times increased sensitivity at lower masses (<15ppb)
- Process Eye™ Professional software for data acquisition, interpretation, recall & alarming
- Pressure selection and response time optimized with inlet valve and orifice options
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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VISION-2000-P-XD Process Monitor, High Sensitivity, Select Pressure and PVD Applications |
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Specifications
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Mass Range1-100, 1-200, or 1-300 amu
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Ion SourceHigh conductance closed ion source
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FilamentsReplaceable twin Tungsten or Thoria filaments
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Mass FilterDouble filter (1'' “RF only” pre-filter with 4'' main filter)
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DetectorDual (Faraday and secondary electron multiplier)
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Maximum Analyzer Operating Pressure7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
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Minimum Detectable Partial Pressure<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
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Minimum Detectable Concentration<15ppb (specified with Argon or Nitrogen for non-interfering peaks)
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Mass StabilityBetter than ±0.1 amu over 8 hours
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ResolutionBetter than 10% valley between peaks of equal height throughout the mass range
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Mounting FlangeDN35CF (70mm/2.75'' OD) Conflat® flange
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Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely interlocked and integrated.
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Analyzer Housing Base PressureBetter than 5e-9 Torr after bakeout
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Bakeout Temperature and Bakeout JacketIncluded for 180°C bakeout
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Operating TemperatureElectronics: 10-40°C, 80% RH (non-condensing)
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Weight33 lbs. (15 kg) to bolt on Process System
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Mobile RGA PlatformOptional RGA trolley to improve versatility (footprint 18x24'', 455x604 mm)
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Pneumatics60-80 psig CDA
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Power Requirements88-264 VAC, 47/63 Hz, 600 Watts
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LED Status IndicationInterlock status, filament emission, SEM, power and communications
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I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control.
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Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
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SoftwareProcess Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® XP, Vista, Server 2008 or Windows 7* (*recommended)
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CommunicationEthernet CAT-5e
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PC RequirementsIntel® Pentium IV® or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive
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Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation process system and customer requirements.
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Shipping Weight44 lbs (20 Kg); can vary depending upon configuration.
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Foreline PumpDry diaphragm standard; Other options available.
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ComplianceCE
Features
Resources
Drawings & CADs
- Vision 2000-P™ XD Dimensions (313.7 kB, PDF)
Literature
- Vision 2000-P™ XD High Sensitivity Process Monitor Datasheet (404.3 kB, PDF)
Ultra-High Velocity