MKS logo
  • Products
      • MKS
      • Newport
      • Ophir
      • Spectra-Physics
      • Atotech
      • ESI
  • Solutions
      • Semiconductor
      • Electronics and Packaging
      • Specialty Industrial
  • Support
      • Global Service
      • MKS Service Solutions
      • RMA Request Form
      • Health & Safety Forms
      • Contact Global Service
      • Technical Support
      • Product Technical Support
      • Training Programs
      • Contact Product Technical Support
      • Technical Resources
      • Literature
      • Manuals
      • Technical Papers
      • Application Notes
      • Standards Compliance
      • View All Technical Resources
      • Contact MKS
  • Company
      • About MKS
      • Guiding Principles
      • Executives & Fellows
      • Solutions & Innovations
      • Legal Information
      • Environmental, Social and Governance
      • Investor Relations
      • Corporate Governance
      • Stock Information
      • Events & Presentations
      • Investor News Releases
      • SEC Filings and Forms
      • All Investor Relations
      • News & Media
      • Trade Shows & Events
      • Press Releases
      • Media Library
      • Careers
      • Job Openings We're Hiring!
      • About MKS
      • MKS Benefits
      • Message from CEO
      • Business Units & Products
      • MY INNOVATION Stories
  • Contact
      • Contact Us Online
      • Corporate Offices
      • Sales & Application Support
      • Calibration, Service & Repairs
      • Product Technical Support
  • Menu 
  • Sign In
  • Compare products
    • Product Comparison 

      Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed.

  • Shopping cart items Shopping cart items
  • Keyword search
    Search
    Submit search
    mks Search
    • Submit search
  • Products
    • MKS
      • Capacitance Manometers
        • Compact Pressure Transducers
        • General Purpose Pressure Transducers
        • High Performance Pressure Transducers
        • Industrial Pressure Transducers
        • Reference Pressure Transducers
        • View All Capacitance Manometers
      • Mass Flow Controllers & Meters
        • Mass Flow Controllers
        • Mass Flow Meters
        • In Situ Flow Verifiers
        • Flow Ratio Controllers
        • Mass Flow Controller Accessories
      • Vacuum Gauges
        • Vacuum Pressure Transducers
        • Vacuum Pressure Sensors
        • Vacuum Gauge Controllers
        • Vacuum Gauge Accessories
        • Vacuum Gauge Calibration
        • Legacy Vacuum Gauges
      • Gas Analyzers
        • Mass Spectrometers
        • Tunable Filter Spectrometers
        • FTIR Gas Analyzers
        • NDIR Gas Analyzers
      • Vacuum Flanges & Fittings
        • ISO-KF Flanges & Fittings
        • ISO-MF Flanges & Fittings
        • CF Flanges & Fittings
        • Butt Weld Flanges & Fittings
        • Custom Vacuum Fabrication
      • RF & Microwave Generators
        • Microwave Generators
        • RF Power Generators
      • Pressure Controllers & Valves
        • Pressure Controllers
        • Vacuum Isolation Valves
        • Downstream Exhaust Throttle Valves
        • Upstream Flow Control Valves
        • Gate Valves
      • Plasma & Reactive Gas Solutions
        • Remote Plasma Sources
        • Ozone Generators & Systems
        • Dissolved Gas
        • Foreline Plasma Clean Systems
      • Automation, Control & Sensing
      • Heater Jackets & Traps
      • Special Offers
      • Virtual Booth
    • Newport
    • Ophir
    • Spectra-Physics
    • Atotech
    • ESI
  • Solutions
    • Semiconductor
    • Electronics and Packaging
    • Specialty Industrial
  • Support
    • Global Service
    • Technical Support
    • Technical Resources
    • Contact MKS
  • Company
    • About MKS
    • Investor Relations
    • News & Media
    • Careers
  • Contact
    • Contact Us Online
    • Corporate Offices
    • Sales & Application Support
    • Calibration, Service & Repairs
    • Product Technical Support
  • Products 0
  • Resources 0

Search Suggestions:

  • Check the spelling of your keyword or search phrase.
  • Try searching with different synonymous keywords.
  • Broaden your search by using fewer keywords.
  • Select an auto-suggested keyword from the search box.
  • Instead, try browsing all product categories.
Resources Here
  • ©2024 MKS Instruments. All rights reserved.

  • United States (US)
  • Terms of UsePrivacy
  •   Support: (978) 645-5500
  • Mon.-Fri. 8am - 5pm EST
  • Contact Us
  • Careers
  • Legal
  • About Us
  • Investors
Facebook Twitter YouTube LinkedIn

Sign In

Need a new account?
Register

Password Reset

Enter your email address below to reset your account password.

Password Reset


Email Verification Required


Cart Items Updated

Remove Product

Remove this product from your comparison list?

Check Order Status

Provide an order number and postal code to check the status of an order or download an invoice for an order that has shipped. Login to view your complete order history.

Sign In Required



To access this and other valuable technical resources, please sign in or register for a new online account.

Add to Cart

mks add to cart
Part:  
Availability: 

Also available on Newport.com

Qty: 
Availability: 
Shop at Newport.com 
quick ship Ultra-High Velocity Learn More

Invalid VAT ID

VAT ID has invalid format. It will not be saved with the order when submitted.

  added to your cart
thumbnail Image AddToCart
Part:  
Availability: 
View Cart & Checkout Continue Shopping

  added to quote
thumbnail ImageUrl Quote
Model:  
Request Quote Continue Shopping