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TEOS Process Traps

Our TEOS process traps when used as one element of a TEOS Effluent Management Subsystemâ„¢, have proven very effective in reducing particulates and increasing uptime. TEOS traps collect TEOS byproducts, preventing them from backstreaming into the furnace and contaminating the pump. In test cases, a greater than 20% reduction in particulates has been recorded. Maintenance is simplified, by cleaning a single component versus many feet of piping. The large trapping capacity leads to longer preventative maintenance cycles. The high trapping efficiency provides better protection to the pump, valves and other downstream instrumentation.
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TEOS Process Traps

TEOS Process Traps

  • Improve wafer yields when used as part of a TEOS Effluent Management Subsystem
  • Overall yield improvement of 2-3%
  • Greater than 20% particle reduction
TEOS Process Trap Accessories

TEOS Process Trap Accessories

  • Replacement trap elements
  • Kalrez flange seals
  • Viton flange seals
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