901P MicroPirani™ - Piezo Loadlock Vacuum Transducer
Model: 901P-17020
901P MicroPirani™ - Piezo Loadlock Vacuum Transducer
Model: 901P-17020

Overview
Overview
The EtherCAT® 901P-17020 Micro Pirani-Piezo Loadlock Vacuum Transducer combines Piezo and MicroPirani™ sensor technologies for significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. It features a 1.0x10-5 to 1,000 Torr pressure measurement range with atmospheric switching, and a size NW16 ISO-KF flange and Viton seal. The 901P has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-5 Torr and atmospheric switching capabilities. Compared to gauges used in traditional loadlock designs, the 901P accurate atmospheric pressure measurement can improve loadlock performance by faster cycle times and prevent contamination of loadlock with atmospheric air. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality with patented, gas independent absolute pressure measurement from 50-1000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume.
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationEtherCAT
- TypeVacuum Transducer
- SensorMicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical ConnectorAnalog: 15-pin, High Density, D-sub male
EtherCAT: two RJ45 female receptacles for incoming and network signals - InterfaceEtherCAT/Analog
- Relays0
- Fitting TypeNW16 ISO-KF
- Installation OrientationAny
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output1-9 VDC (1 VDC per Decade)
- Analog Output Resolution16 bit
- Power Requirements9 - 30 VDC, <1.2 Watts maximum
- MicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
- MicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy-10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
- Piezo Differential Repeatability-760 to 10 Torr ±1% of Reading
- Piezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit1500 Torr (absolute)
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationEtherCAT
- TypeVacuum Transducer
- SensorMicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical ConnectorAnalog: 15-pin, High Density, D-sub male
EtherCAT: two RJ45 female receptacles for incoming and network signals - InterfaceEtherCAT/Analog
- Relays0
- Fitting TypeNW16 ISO-KF
- Installation OrientationAny
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output1-9 VDC (1 VDC per Decade)
- Analog Output Resolution16 bit
- Power Requirements9 - 30 VDC, <1.2 Watts maximum
- MicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
- MicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy-10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
- Piezo Differential Repeatability-760 to 10 Torr ±1% of Reading
- Piezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit1500 Torr (absolute)
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
Resources & Downloads
Literature
901P Micropirani/Piezo Loadlock Transducer(330.6 kB, PDF)
Drawings & CADs
901P Vacuum Transducer Dimensional Drawing(87.7 kB, PDF)
