Multi-gas, Multi-range, Elastomer sealed 50 slm Mass Flow Controller with Shut-off Valve
Multi-gas, Multi-range, Elastomer sealed 50 slm Mass Flow Controller with Shut-off Valve
The G-Series GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Shut-off valve leak rate of less than 4x10E-09 atm-cc/sec He
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Less than 750 millisecond settling time
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez See All Features
Configuration Options
The following options are available for GV50A Mass Flow Controllers with Shut-off Valve
Ordering Code Example: GV50A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GV50A Mass Flow Controller | GV50A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 0.125 in. Swagelok (1000 sccm or below) | A |
| 0.25 in. Swagelok | S |
| 0.5 in. Swagelok | K |
| 0.375 in. Swagelok | J |
| 2 VCR Male (1000 sccm or below) | B |
| 4 VCR Male | R |
| 8 VCR Male | T |
| 4 VCO Male | G |
| 8 VCO Male | D |
| NW16 ISO-KF | U |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| 9 pin D connector (Analog 0-5 VDC) | A |
| 9 Pin D connector, Tied Grounds (Analog 0-5 VDC) | L |
| 15 pin D connector (Analog 0-5 VDC) | B |
| 15 pin D connector, Tied Grounds (Analog 0-5 VDC) | M |
| 15 pin D connector (Analog 4-20 mA) | H |
Seal Materials |
|
| Viton® | V |
| Buna-N | B |
| Neoprene® | N |
| EPDM | E |
| Kalrez | K |
Valve/Device Type |
|
| Normally Closed | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Specifications
- TypeMass Flow Controller
- Full Scale Flow Range5-50,000 sccm
- Control Range2-100% of Full Scale
- Fitting TypeCompatible with:
6 mm Swagelok
8 mm Swagelok
10 mm Swagelok
12 mm Swagelok
0.125 in. Swagelok (for 1000 sccm N2 equivalent or below)
0.25 in. Swagelok
0.5 in. Swagelok
0.375 in. Swagelok
Swagelok 4 VCO male
Swagelok 4 VCR male
Swagelok 8 VCR male
Swagelok 8 VCO Male
Swagelok 2 VCR Male (for 1000 sccm N2 equivalent or below)
KF-16 - Seal MaterialViton®
Buna-N
Neoprene®
EPDM
Kalrez - ConnectorEtherCAT
DeviceNet
RS485 (9 pin connector)
Profibus (1480 Compatible)
Profibus (1179B Compatible)
PROFINET
9 pin D connector (Analog 0-5 VDC)
9 Pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 0-5 VDC)
15 pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 4-20 mA) - Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10-5000 sccm; 10-40 psid, 10000-0000 sccm; 15-40 psid, 30000-50000 sccm; 25-40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy± 1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability± 0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient< 0.05% of Full Scale/°C
- Span Temperature Coefficient< 0.08% of Reading/°C
- Inlet Pressure Coefficient< 0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10-50°C
- Storage Humidity0-95% Relative Humidity, non-condensing
- Storage Temperature-20° to 80°C
- External Leak Integrity< 1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, KM-45
- Surface Finish16µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Features
Wide Choice of Digital and Analog Interfaces
The GV50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GV50A’s analog and digital I/O can easily be used to replace those same I/O types of the 2179A MFCs. All GV50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
Standard 3 inch Footprint
The GV50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
All Metal Wetted Surfaces
The design of the GV50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GV50A comes standard with Viton® seals along with options for Buna, Neoprene®, EPMD or Kalrez® allowing for the device’s use with gases requiring one of these alternatives.
Percent of Setpoint Accuracy
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
Embedded User Interface
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
Patented Thermal Sensor
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.
Integral Shut-off Valve
The GV50A incorporates a normally closed, diaphragm type positive shut-off valve. This shut-off valve provides closure to 4x109 scc/sec of Helium.
Communication Options/Specifications
| Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
|---|---|---|---|---|---|
| Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
| Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
| Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
| Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
| MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
| Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
| Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
| Compliance | CE | CE | CE | CE | CE |
Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | CB147-1-10 | |||||
| CB147-12-10 | |||||
| CB259-5-10 |
Resources
Literature
Application Notes
Accelerated Automotive Emission Control Catalyst Research(0, PDF) MFCs for Gas Control in Case Hardening Processes(246.3 kB, PDF) Gas Delivery for Plasma Spray Coating Applications(320.8 kB, PDF) Gas Correction Factors for Thermal-based Mass Flow Sample Gas Codes for Mass Flow Controllers/Meters
Manuals
G and I Series Mass Flow Controller/Meter Manual(2.2 MB, PDF) G-Series Mass Flow Controller/Meter DeviceNet™ Supplement(112.5 kB, PDF) G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement(86.9 kB, PDF) G-Series Mass Flow Controller/Meter RS485 Supplement(149.3 kB, PDF) G-Series Mass Flow Controller/Meter PROFINET Communications Supplement(1 MB, PDF) G-Series MFC Web Browser Tutorial(5.6 MB, PDF) G-Series Mass Flow Controller & Meter EtherCAT Manual Supplement(1.1 MB, PDF)
Drawings & CADs
GV50A Mass Flow Controller 3D Model Files GV50 Mass Flow Controller Dimensional Drawing(335.8 kB, PDF)
Device Description Files
GV50A EDS File(346.2 kB, EDS) GV50A ESI File(132 kB, XML) GV50A Profibus GSD File (1179B compatible)(2.5 kB, GSD) GV50A Profibus GSD File (1480 compatible)(2.6 kB, GSD)
