HPQ3 High Pressure 0.001 Torr Residual Gas Analyzer
Overview
Residual Gas Analysis (RGA) is a routine diagnostic tool for any vacuum engineer but the traditional upper working limit of 1e-4 mbar total pressure is restrictive for many process applications. The HPQ3 RGA allows operation up to 0.001 Torr without the need for differential pumping. The field proven technology of the HPQ analyser coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The resulting system is less complex, with reduced installation requirements, offering a higher level of reliability at a substantially lower cost.
- Upper working limit of 0.001 Torr total pressure
- Leak detection of vacuum lines, coolant lines, welds, and seals
- Chamber contaminant monitoring, including hydrocarbons
- Verify the quality of process gases
Products
Configuration Options
HPQ3 High Pressure Residual Gas Analyzer are available with the following options.
Ordering Code Example: 993-410-090
| Configuration Option | Option Code |
|---|---|
|
HPQ3 Residual Gas Analyzer |
993-410-09 |
Filament |
|
| Tungsten | 0 |
| Thoria coated iridium | 1 |
Specifications
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Mass Range1-100 amu
-
FilamentsTwin Tungsten or Thoria Coated Iridium
-
DetectorFaraday
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Maximum Analyzer Operating Pressure0.001 Torr (0.0013 mbar)
-
Minimum Detectable Partial Pressure8e-11 Torr (1e-10 mbar)
-
Minimum Detectable Concentration5ppm at 0.001 Torr (0.0013 mbar)
-
SoftwareBuilt-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software Process Eye Professional and TOOLweb RGA Windows software packages for Windows xP, Vista or Win7 (32 and 64bit.)
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Mass Stability±0.1 amu over 8 hours at stable ambient
-
ResolutionBetter than 10% valley for peaks of equal height across mass range
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Mounting FlangeDN38CF (70mm/2.75inch OD) Conflat
-
Bake Out Temperature250°C with electronics removed
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Operating TemperatureElectronics: 10-40°C
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Power Requirements24V DC, 3A external universal voltage supply (included)
-
Maximum Operating Conditions80% RH (non condensing)
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Data Acquisition MethodDedicated real time acquisition processor
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Data Acquisition Speed< 3ms per point for analog or barchart scanning
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Data Collection MethodsAnalog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
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Communication10/100 Base-T Ethernet, static or automatically assigned IP addresses
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Settling Time< 20ms to 1 ppm of Maximum Signal
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Control MethodCE operating system processor with web-server interface
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Command StructureDocumented SDK and ASCII command protocols
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Filament ProtectionDedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
-
ComplianceCE (control unit)
Features
Resources
Literature
- HPQ3/HPQ3S High Pressure Residual Gas Analyzer (RGA) (384.1 kB, PDF)
Drawings & CADs
- HPQ3/HPQ3S RGA Dimensional Drawing (127 kB, PDF)
Ultra-High Velocity