Microvision 2 Flexible, Integration-ready Residual Gas Analyzer
Overview
The Microvision 2 Residual Gas Analyzer is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. In addition, the Microvision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA.
- Field proven quadrupole mass analyzer design
- Faster and more accurate responses in closed-loop control applications
- Acquire the highest quality of data at the fastest possible speeds
- Signals close to the noise floor can still be reliably measured
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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MICROVISION-2 Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2 |
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Specifications
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Mass RangeDouble: 100, 200, 300 amu
5" Single: 100, 200 amu
Triple: 100, 200, 300 amu -
Faraday1.5 x 10-11 Torr
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FilamentsTungsten or Thoria coated Iridium
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Maximum Analyzer Operating Pressure7.6 x 10-5 Torr
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Ion Source Sensitivity2.0 x 10-4 A/mbar
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Minimum Detectable Concentration3 standard deviations of baseline noise at 300 ms integration
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ResolutionBetter than 10% valley for peaks of equal height across mass range
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Bake Out Temperature250°C (with extender or electronics removed)
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Operating Temperature200°C Faraday only with electronics 10-40°C 150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar 90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
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UHV Out-gassing Rate< 1.0 x 10-9 mbar -l/s
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Microchannel plate3.8 x 10-14 Torr
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Single channel EM7.6 x 10-15 Torr (triple version)
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Mounting FlangeDN 40 CF-F
Features
Resources
Drawings & CADs
- Microvision 2 RGA Dimensional Drawing (281.2 kB, PDF)
Literature
- Microvision 2 Residual Gas Analyzer Datasheet (910.2 kB, PDF)
Ultra-High Velocity