V-100 Bellows Vacuum Isolation Valve

V-100 Bellows Vacuum Isolation Valve is a 4-inch valve that is available in both manual and pneumatic options, and either angle or inline configurations. A formed stainless-steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional o-ring shaft-sealed valve.

NW100
Designed to ensure product quality, reliability, and value
Spring-closed, air-open

See All Features

Configuration Options

Please see the 150/160 and V-100 Valve datasheet for available product options.

Description
V100-VALVE Standard Vacuum Valve, NW100 Port

Specifications

Type
Large Standard Single-stage Vacuum Isolation Valves
Vacuum Range
15 psig to 10^-9 Torr
Body Configuration
Angle, Inline
Port Size
NW100
Flange Size
MF100, CF 6 inch, KF100, 4 inch tube
Helium Leak Rate
1.0 x 10^-9 std cc/sec
Actuation
Manual or Pneumatic
Body, Nosepiece and Bellows Termination Material
Type 304 stainless steel
Bellows Material
Type 321 stainless steel
Nose Seal
Viton®, Buna, Kalrez, or Chemraz
Bonnet Seal
Viton®, Buna, Kalrez, or Chemraz

Cylinder Volume
1.6 x 10^-2 ft³ (4.6 x 10^-4 m³)
Cylinder Air Pressure
Minimum: 50 psig (4.5 x 105 N/m² abs)
Maximum: 100 psig (7.9 x 105 N/m² abs)
Limit Switch Rating
5A - 250 VAC
Single Pole, Single Throw
5A - 30 VDC
Blow-By Pressure
32 psia (2.2 x 10⁵ N/m² abs)
Actuation Time
Opening: 2, Closing: 2
Maximum Internal Spring Closing Pressure
30 psia (2.0 x 10⁵ N/m² abs)
Maximum Bakeout Temperature
150°C
Conductance
Angle: 390 ltr/sec, Inline: 360 ltr/sec
Pneumatic Air Supply Fitting
1/8 in. NPT-F

Features

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Accessories

Replacement Solenoids

Description	Compatibility	Price
100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	$179
100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	$221
100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$153
100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$233
100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$189
100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	$111

Valve Seals

Description	Compatibility	Price
100001702Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port	UNIVERSAL	$35
100001700Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port	UNIVERSAL	$31
100001701Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port	UNIVERSAL	$32
100001703Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port	UNIVERSAL	$36
100001699Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port	UNIVERSAL	$30
100001704Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port	UNIVERSAL	$37
100001674Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port	UNIVERSAL	$59
100001675Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port	UNIVERSAL	$44
100001673Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port	UNIVERSAL	$35
100001676Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port	UNIVERSAL	$53
100001677Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port	UNIVERSAL	$60
100001691Viton Seal Set, 150, 160 Valves, NW80 Port	UNIVERSAL	$66
100006113Viton Seal Set, 150, 160 Valves, NW160 Port	UNIVERSAL	$242

Limit Switches

Description	Compatibility	Price
100001682Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16	UNIVERSAL	$158
100001684Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80	UNIVERSAL	$132
100003663Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100	UNIVERSAL	$147
100005802Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160	UNIVERSAL	$179
100001520Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40	UNIVERSAL	$97
100001683Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63	UNIVERSAL	$132

Internal Rebuild Kits

Description	Compatibility	Price
100006122Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16	UNIVERSAL	$321
100006124Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40	UNIVERSAL	$410
100006125Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50	UNIVERSAL	$557
100006126Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63	UNIVERSAL	$641
100006123Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25	UNIVERSAL	$338
100006127Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80	UNIVERSAL	$767
100006128Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100	UNIVERSAL	$924
100006129Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160	UNIVERSAL	$1,869

Other Accessories

Resources

Literature

Series 150/160 and V-100 Valves(496.9 kB, PDF)

V-100 Bellows Vacuum Isolation Valve

V-100 Bellows Vacuum Isolation Valve

Configuration Options

Specifications

Features

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Other Accessories

Resources

Literature

Related Products

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