Features

Formed Bellows

Since bellows are a critical factor in valve reliability, MKS incorporates formed bellows into the 150/160 valves. The first major advantage of using formed bellows is consistency. Since formed bellows do not have welds joining each membrane, there is no stress concentration and fatigue failure from non-uniform welds. The second advantage is that the bellows convolutions never touch completely in the compressed position. Many vacuum processes, like chemical vapor or thin film deposition contain particulate contamination. If small particles fall between formed bellows, they have no effect. If similar particles fall between welded, nested bellows, they deform the membranes, cause stress concentration, and lead to early bellows failure.

Install In Any Position

MKS vacuum valves may be installed in any position, with either the bellows or the nosepiece facing the pump. In systems with condensable materials, it is advantageous to install the valve with the nosepiece toward the chamber. The electropneumatic valve has a solenoid valve attached to the cylinder with a nipple. The cap screws fixing the cylinder to the body may be removed and the cylinder indexed at 90° increments for valves of sizes .75'' to 1.5'', and 60° increments for valves with port sizes 2'' to 6''. If necessary, the solenoid valve can be removed and located remotely.

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Accessories

Replacement Solenoids

Compare Description Drawings, CAD & Specs Avail. Price
Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt
Solenoid Valve, Replacement, 24 VDC, 7 Watt
Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt
Solenoid Valve, Replacement, 12 VDC, 7 Watt
Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt
Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt

Valve Seals

Compare Description Drawings, CAD & Specs Avail. Price
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port
Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port
Viton Seal Set, 150, 160 Valves, NW80 Port
Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port
Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port
Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port
Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port
Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port
Viton Seal Set, 150, 160 Valves, NW160 Port
Viton Seal Set, Series 150 or 160 Pneumatic Vacuum Valves, NW100 Port

Limit Switches

Compare Description Drawings, CAD & Specs Avail. Price
Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16
Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40
Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63
Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80
Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100
Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160

Internal Rebuild Kits

Compare Description Drawings, CAD & Specs Avail. Price
Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25
Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40
Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50
Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63
Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100
Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80
Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW25
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW16
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW40
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW50
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW80
Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW63

Other Accessories

Compare Description Drawings, CAD & Specs Avail. Price

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