Specifications

  • Absolute Measurement Range
    1.0 x 10-9 to 760 Torr
  • Differential Measurement Range
    -750 to +250 Torr
  • Digital Communication
    DeviceNet
  • Type
    Vacuum Gauge Module
  • Display
    No
  • Interface
    DeviceNet
  • Relays
    2
  • Fitting Type
    2.75 in. CF
  • Operating Temperature
    10 - 40°C (50° to 104°F), non-condensing
  • Maximum Bakeout Temperature
    105°C (221°F) with electronics removed
  • Storage Temperature
    -40 - 70°C (-40 - 158°F)
  • Relay Contact Rating
    Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
  • Power Requirements
    24 VDC (11 - 26.4 VDC) at 0.2A nominal
  • Accuracy
    Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
  • Repeatability
    1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
  • Internal Volume
    10.8 cm3 (0.65 in.3)
  • Exposed Materials
    304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
  • Electronic Casing and Flange
    Aluminum Extrusion with Powder-coat
  • Compliance
    CE
  • Filament
    Yttria-coated Iridium
  • Response Time
    <25 mseconds
  • Connectors
    5-pin micro connector
  • Units
    Torr
  • DeviceNet Messaging
    Polled I/O and explicit
  • DeviceNet Address
    0 - 63, selected by using data rate switch
  • DeviceNet Baud Rates
    125, 250 or 500 kbaud, switch selectable
  • X-ray Limit
    <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
  • Emission Current
    Autoranging
  • Degas
    Electron bombardment, 3 Watts for 1 minute/filament
  • Automatic Ionization Gauge On Setting
    2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
  • Automatic Switch to High Emission Setting
    5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
  • Automatic Ionization Gauge Off Setting
    3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
  • Automatic Switch to Low Emission Setting
    1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
  • Heat-loss Sensor Wires
    Gold-plated tungsten
  • LED Indicator
    Module status
  • Maximum Inrush Current
    0.25 Amps

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