925 Micro Pirani™ Vacuum Transducers
Model: 925-11030
925 Micro Pirani™ Vacuum Transducers
Model: 925-11030

Overview
Overview
The 925-11030 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. This 925 transducer offers a wide measurement range from 1x10-5 Torr to atmosphere, and features a size NW16 ISO-KF flange fitting. It has a RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. A 15-pin HD sub-D male connector features an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or controlling and three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The MicroPirani sensor consists of a silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently, the sensor is insensitive to the mounting position. Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured. Like all thermal conductivity sensors, the 925 is sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via the digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems. The 925 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 760 Torr
- Digital CommunicationRS232
- TypeVacuum Transducer
- SensorMicroPirani (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS232/analog
- Relays3
- Fitting TypeNW16 ISO-KF
- Installation OrientationAny
- Set Point Range5.0 x 10-4 - 500 Torr
- Calibration GasAir, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, Neon
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type, set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
- Digital StatusPressure Reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
- Analog Output1-9 VDC (1 VDC per Decade)
- Analog Output Resolution16 bit
- Relay Contact Rating1 Amp @ 30 VAC/DC, resistive
- Relay Response<100 msec maximum
- Power Requirements9 - 30 VDC, <1.5 Watts maximum
- Accuracy5 x 10-4 to 10-3 Torr ±10% of Reading, 10-3 - 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading (typical)
- Repeatability10-3 to 100 Torr ±2% of Reading (typical)
- Overpressure Limit3000 Torr (absolute)
- Exposed Materials304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton, Low out gassing epoxy resin
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Digital Baud Rates4800 - 230400 Baud
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 760 Torr
- Digital CommunicationRS232
- TypeVacuum Transducer
- SensorMicroPirani (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS232/analog
- Relays3
- Fitting TypeNW16 ISO-KF
- Installation OrientationAny
- Set Point Range5.0 x 10-4 - 500 Torr
- Calibration GasAir, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, Neon
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type, set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
- Digital StatusPressure Reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
- Analog Output1-9 VDC (1 VDC per Decade)
- Analog Output Resolution16 bit
- Relay Contact Rating1 Amp @ 30 VAC/DC, resistive
- Relay Response<100 msec maximum
- Power Requirements9 - 30 VDC, <1.5 Watts maximum
- Accuracy5 x 10-4 to 10-3 Torr ±10% of Reading, 10-3 - 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading (typical)
- Repeatability10-3 to 100 Torr ±2% of Reading (typical)
- Overpressure Limit3000 Torr (absolute)
- Exposed Materials304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton, Low out gassing epoxy resin
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Digital Baud Rates4800 - 230400 Baud
Resources & Downloads
Literature
925 MicroPirani™ Transducer(302.9 kB, PDF)
Drawings & CADs
925 MicroPirani™ Vacuum Transducer Dimensional Drawing(82.7 kB, PDF)


