V-100 Bellows Vacuum Isolation Valve is a 4-inch valve that is available in both manual and pneumatic options, and either angle or inline configurations. A formed stainless-steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional o-ring shaft-sealed valve.
- NW100
- Designed to ensure product quality, reliability, and value
- Spring-closed, air-open See All Features
Configuration Options
Please see the 150/160 and V-100 Valve datasheet for available product options.
Specifications
- TypeLarge Standard Single-stage Vacuum Isolation Valves
- Vacuum Range15 psig to 10-9 Torr
- Body ConfigurationAngle, Inline
- Port SizeNW100
- Flange SizeMF100, CF 6 inch, KF100, 4 inch tube
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationManual or Pneumatic
- Body, Nosepiece and Bellows Termination MaterialType 304 stainless steel
- Bellows MaterialType 321 stainless steel
- Nose SealViton®, Buna, Kalrez, or Chemraz
- Bonnet SealViton®, Buna, Kalrez, or Chemraz
- Cylinder Volume1.6 x 10-2 ft3 (4.6 x 10-4 m3)
- Cylinder Air PressureMinimum: 50 psig (4.5 x 105 N/m2 abs)
Maximum: 100 psig (7.9 x 105 N/m2 abs) - Limit Switch Rating5A - 250 VAC
- Single Pole, Single Throw5A - 30 VDC
- Blow-By Pressure32 psia (2.2 x 105 N/m2 abs)
- Actuation TimeOpening: 2, Closing: 2
- Maximum Internal Spring Closing Pressure30 psia (2.0 x 105 N/m2 abs)
- Maximum Bakeout Temperature150°C
- ConductanceAngle: 390 ltr/sec, Inline: 360 ltr/sec
- Pneumatic Air Supply Fitting1/8 in. NPT-F
Features
Applications
Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.
Accessories
Replacement Solenoids
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt | |||||
![]() | 100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt | |||||
![]() | 100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt | |||||
![]() | 100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt | |||||
![]() | 100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt | |||||
![]() | 100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt |
Valve Seals
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100001702Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port | |||||
![]() | 100001700Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port | |||||
![]() | 100001701Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port | |||||
![]() | 100001703Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port | |||||
![]() | 100001699Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port | |||||
![]() | 100001704Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port | |||||
![]() | 100001674Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port | |||||
![]() | 100001675Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port | |||||
![]() | 100001673Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port | |||||
![]() | 100001676Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port | |||||
![]() | 100001677Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port | |||||
![]() | 100001691Viton Seal Set, 150, 160 Valves, NW80 Port | |||||
![]() | 100006113Viton Seal Set, 150, 160 Valves, NW160 Port |
Limit Switches
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100001682Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16 | |||||
![]() | 100001684Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80 | |||||
![]() | 100003663Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100 | |||||
![]() | 100005802Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160 | |||||
![]() | 100001520Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40 | |||||
![]() | 100001683Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63 |
Internal Rebuild Kits
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100006122Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16 | |||||
![]() | 100006124Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40 | |||||
![]() | 100006125Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50 | |||||
![]() | 100006126Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63 | |||||
![]() | 100006123Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25 | |||||
![]() | 100006127Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80 | |||||
![]() | 100006128Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100 | |||||
![]() | 100006129Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160 |
Other Accessories
Resources
Literature
Series 150/160 and V-100 Valves(496.9 kB, PDF)











