910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers
Model: 910-21030
910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers
Model: 910-21030

Overview
Overview
The 910-21030 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW25 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy. The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr. The 910 has RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 910 also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The 910 has three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement. The 910 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Digital CommunicationRS232
- TypeVacuum Transducer
- SensorMicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS232/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point Range5.0 x 10-4 - 1500 Torr, Absolute
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output1-9.2 VDC, (1 VDC per Decade)
- Analog Output Resolution16 bit
- Relay Contact Rating1 Amp @ 30 VAC/DC, resistive
- Relay Response100 msec maximum
- Power Requirements9 - 30 VDC, <1.2 Watts maximum
- Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading
- Repeatability5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading
- Overpressure Limit2250 Torr (absolute)
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Digital Baud Rates4800 - 230400 Baud
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Digital CommunicationRS232
- TypeVacuum Transducer
- SensorMicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS232/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point Range5.0 x 10-4 - 1500 Torr, Absolute
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output1-9.2 VDC, (1 VDC per Decade)
- Analog Output Resolution16 bit
- Relay Contact Rating1 Amp @ 30 VAC/DC, resistive
- Relay Response100 msec maximum
- Power Requirements9 - 30 VDC, <1.2 Watts maximum
- Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading
- Repeatability5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading
- Overpressure Limit2250 Torr (absolute)
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Digital Baud Rates4800 - 230400 Baud
Resources & Downloads
Drawings & CADs
910 Vacuum Transducer Dimensional Drawing(66.8 kB, PDF)
Literature
910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer(297.3 kB, PDF)
