HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
Overview
The HPQ3S residual gas analyzes allows operation up to 0.008 Torr without the need for differential pumping. The field proven technology, coupled with the latest innovative Microvision 2 electronics, give data quality not previously seen in this class of instrument. The resulting system is less complex, with reduced installation requirements, offering a higher level of reliability at a substantially lower cost. In addition, the HPQ3S uses application validated correction algorithms to compensate for the sensitivity variation arising from ion-molecule interactions in the ion source at higher pressures.
- Upper working limit of 0.008 Torr total pressure
- Leak detection of vacuum lines, coolant lines, welds, and seals
- Application validated correction algorithms to compensate for sensitivity variation
- Verify the quality of process gases
Products
Configuration Options
HPQ3S High Pressure Residual Gas Analyzer are available with the following options.
Ordering Code Example: 994-410-090
| Configuration Option | Option Code |
|---|---|
|
HPQ3S Residual Gas Analyzer |
994-41 |
Filament |
|
| Tungsten | 0 |
| Thoria coated iridium | 1 |
HPQ3S Gauge |
|
| Simple elbow and no gauge | 090 |
| F-Chamber with GP Micro-ion gauge | 09A |
| F-Chamber with MKS 909A ion gauge | 09B |
Additional gauge options are available. Please consult factory for ordering information.
Specifications
-
Mass Range1-100 amu
-
FilamentsTwin Tungsten or Thoria Coated Iridium
-
DetectorFaraday
-
Maximum Analyzer Operating Pressure0.008 Torr (0.001 mbar) - Application dependent
-
Minimum Detectable Partial Pressure8e-11 Torr (1e-10 mbar)
-
Minimum Detectable Concentration5ppm at 0.001 Torr (0.0013 mbar)
-
SoftwareBuilt-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
-
Mass Stability±0.1 amu over 8 hours at stable ambient
-
ResolutionBetter than 10% valley for peaks of equal height across mass range
-
Mounting FlangeDN38CF (70mm/2.75inch OD) Conflat
-
Bake Out Temperature250°C with electronics removed
-
Operating TemperatureElectronics: 10-40°C
-
Power Requirements24V DC, 3A external universal voltage supply (included)
-
Maximum Operating Conditions80% RH (non condensing)
-
Data Acquisition MethodDedicated real time acquisition processor
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Data Acquisition Speed< 3ms per point for analog or barchart scanning
-
Data Collection MethodsAnalog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
-
Communication10/100 Base-T Ethernet, static or automatically assigned IP addresses
-
Settling Time< 20ms to 1 ppm of Maximum Signal
-
Control MethodCE operating system processor with web-server interface
-
Command StructureDocumented SDK and ASCII command protocols
-
Filament ProtectionDedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
-
Number of Stored Source Settings6 sets including ion source parameters, alignment, resolution, detector calibrations
-
ComplianceCE (control unit)
-
Software Controlled Tuning ParametersElectron energy, 20 to 100eV Emission current, 0 to 2 mA Ion energy, 0 to 10V Ion extraction, 0 to -130V Filter pole bias, 0 to -10V to +10V
Features
Resources
Literature
- HPQ3/HPQ3S High Pressure Residual Gas Analyzer (RGA) (384.1 kB, PDF)
Drawings & CADs
- HPQ3/HPQ3S RGA Dimensional Drawing (127 kB, PDF)
Ultra-High Velocity