631F 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer
Overview
The 631F 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer, operating at very high internal temperatures, minimizes the deposition of process byproducts within the sensor by nearly eliminating output drift caused by contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).
- 150°C or 200°C operating temperatures reduce contamination
- 0 to 10 VDC analog output proportional to absolute pressure
- Two optional pressure trip relays for controlling external equipment
- Inconel® sensor resists corrosion
- Performance is unaffected by pressure bursts
- Compact design & self-contained electronics save space
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,111.00
|
631F11T8FHBB Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,111.00 |
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Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,690.00
|
631F11T8FPBB Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,690.00 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,648.00
|
631F11TBFH Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $3,648.00 |
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Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$4,227.00
|
631F11TBFP Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $4,227.00 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
$3,677.00
|
631F11TMFH Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays | $3,677.00 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
|
631F11TMFHAA Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays |
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Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,111.00
|
631F13T8FHBB Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,111.00 |
|
|||
|
|
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,690.00
|
631F13T8FPBB Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,690.00 |
|
|||
|
|
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,648.00
|
631F13TBFH Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $3,648.00 |
|
|||
|
|
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$4,227.00
|
631F13TBFP Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $4,227.00 |
|
|||
|
|
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
$3,677.00
|
631F13TMFH Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays | $3,677.00 |
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Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
|
631F13TMFHAA Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays |
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Configuration Options
The following options are available for 631F Baratron® Heated Capacitance Manometers
Ordering Code Example: 631FXXUYZTRR Absolute Manometer
| Configuration Option | Option Code |
|---|---|
| 631F Absolute Capacitance Manometer | 631F |
Full Scale Range |
|
| 1 Torr | 01 |
| 2 Torr | 02 |
| 10 Torr | 11 |
| 30 Torr | 31 |
| 100 Torr | 12 |
| 1000 Torr | 13 |
Units of Measurement |
|
| Torr | T |
| mbar | M |
| Pascal | L |
Fittings |
|
| 0.5 in. OD tube | A |
| 8 VCR female, 1.58 in. port length | B |
| 8 VCR female, 2.1 in. port length | 8 |
| 8 VCR female, 2.5 in. port length | 9 |
| NW16 ISO-KF | D |
| 1.5 in. TriClover | M |
| 2.0 in. TriClover | N |
Accuracy |
|
| 0.50% Reading | F |
Temperature |
|
| 150°C | H |
| 200°C | P |
Integral Relays |
|
| No relays | None |
| Trip Point A Above Setpoint, Trip Point B Above Setpoint | AA |
| Trip Point A Above Setpoint, Trip Point B Below Setpoint | AB |
| Trip Point A Below Setpoint, Trip Point B Below Setpoint | BB |
| Trip Point A Below Setpoint, Trip Point B Above Setpoint | BA |
Specifications
-
TypeVacuum/pressure Transducer
-
Measurement TypeAbsolute
-
Full Scale Pressure Ranges1, 2, 10, 30, 100, and 1000 Torr
-
Sensor TemperatureControlled to 150°C or 200°C
-
Accuracy0.50% of Reading
-
Analog Output0-10 VDC into >10 kΩ load
-
Analog Connector15-pin D-sub
-
Trip Relays2 internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range
-
Resolution0.01% of Full Scale
-
Zero Temperature Coefficient150°C Versions:0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range)
200°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)
-
Span Temperature Coefficient0.02% of Reading/°C
-
Response Time50 msec
-
Warm-up Time4 hours
-
Internal Volumev
-
Operating Temperature Range15-50°C
-
Overpressure Limit45 psia (310 kPa)
-
Materials Exposed to Process GasesInconel® or Incoloy® nickel alloys
-
Power Requirements±15 VDC (±5%) @ 1.0 amps max.
-
Ambient Airflow Requirements150°C Versions: 50 ft/min for ambient temperatures of 45-50°C
200°C Versions: 150 ft/min for ambient temperatures of 45-50°C -
ComplianceCE
Features
Resources
Literature
- 631F Heated (150°C or 200°C) Absolute Baratron® Capacitance Manometer (2 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS 631F High Temperature Transducer Manual (848.8 kB, PDF)
- 631 Capacitance Manometer Pin-outs (27.2 kB, PDF)
Ultra-High Velocity